教員情報 - 内田　秀雄

ウチダ　ヒデオ UCHIDA Hideo
内田　秀雄

所属工学部電気電子システム工学科

大学院工学研究科電気電子工学専攻

職名准教授

著書・論文歴
論文	Effects of deposition gas pressure on the properties of hydrogenated amorphous carbon nitride films grown by surface wave microwave plasma chemical vapor deposition Diamond and Related Materials Vol.14,975-982頁 2005
論文	Effects of deposition gas pressure on the properties of hydrogenated amorphous carbon nitride films grown by surface wave microwave plasma chemical vapor deposition Diamond and Related Materials Vol.14,975-982頁 2005
論文	Photovoltaic characteristics of nitrogen-doped amorphous carbon thin-films grown on quarts and flexible plastic substrates by microwave surface wave plasma CVD Diamond and Related Materials Vol.14,1084-1088頁 2005
論文	Photovoltaic characteristics of nitrogen-doped amorphous carbon thin-films grown on quarts and flexible plastic substrates by microwave surface wave plasma CVD Diamond and Related Materials Vol.14,1084-1088頁 2005
論文	Photovoltaic characteristics of nitrogen-doped amorphous carbon thin-films grown on quartz and flexible plastic substrates by microwave surface wave plasma CVD Diamond and Related Materials Vol.14,1084-1088頁 2005
論文	Photovoltaic characteristics of nitrogen-doped amorphous carbon thin-films grown on quartz and flexible plastic substrates by microwave surface wave plasma CVD Diamond and Related Materials Vol.14,1084-1088頁 2005
論文	Photovoltaic characteristics of postdeposition iodine-doped amorphous carbon films by microwave surface wave plasma chemical vapor deposition Applied physics letters Vol.87, 161912 2005
論文	Photovoltaic characteristics of postdeposition iodine-doped amorphous carbon films by microwave surface wave plasma chemical vapor deposition Applied physics letters Vol.87, 161912 2005
論文	Effects of iodine doping on optoelectronic properties of diamond-like carbon thin films deposited by microwave surface wave plasma CVD Diamond and Related Materials Vol. 13,2136-2139頁 2004
論文	Effects of iodine doping on optoelectronic properties of diamond-like carbon thin films deposited by microwave surface wave plasma CVD Diamond and Related Materials Vol. 13,2136-2139頁 2004
論文	The optical properties of nitrogenated amorphous carbon grown by a novel surface wave microwave plasma CVD method Modern Physics Letters B Vol.18,987 2004
論文	The optical properties of nitrogenated amorphous carbon grown by a novel surface wave microwave plasma CVD method Modern Physics Letters B Vol.18,987 2004
論文	Application of Phosphorus and Boron Diffusion Parameters Extracted from Predeposition to Drive-in Diffusion for Bulk Silicon and Silicon-on-Insulator Japanese Journal of Applied Physics Vol.42, Part 1 (No.4A) 2003
論文	Application of Phosphorus and Boron Diffusion Parameters Extracted from Predeposition to Drive-in Diffusion for Bulk Silicon and Silicon-on-Insulator Japanese Journal of Applied Physics Vol.42, Part1 (No.4A) 2003
論文	Sb Pile-up at Oxide/Si Interface during Drive-in Diffusion after Predeposition Using Doped Oxide Source Japanese Journal of Applied Physics Vol.42, Part 1 (No.3) 2003
論文	Sb Pile-up at Oxide/Si Interface during Drive-in Diffusion after Predeposition Using Doped Oxide Source Japanese Journal of Applied Physics Vol.42, Part1 (No.3) 2003
論文	Boron Diffusion Profiles in Ultrathin Silicon-on-Insulator Structures and Their Relation to Crystalline Quality Japanese Journal of Applied Physics Vol.41, Part 1 (No.7A) 2002
論文	Boron Diffusion Profiles in Ultrathin Silicon-on-Insulator Structures and Their Relation to Crystalline Quality Japanese Journal of Applied Physics Vol.41, Part1 (No.7A) 2002
論文	Surface Concentration Dependence of Diffusion Profile Shape for Phosphorus in Si Solid State Phenomena Vols.87-79 2001
論文	Surface Concentration Dependence of Diffusion Profile Shape for Phosphorus in Si Solid State Phenomena Vols.87-79 2001