Book and thesis
Papers
Effects of deposition gas pressure on the properties of hydrogenated amorphous carbon nitride films grown by surface wave microwave plasma chemical vapor deposition Diamond and Related Materials Vol.14,pp.975-982 2005
Papers
Effects of deposition gas pressure on the properties of hydrogenated amorphous carbon nitride films grown by surface wave microwave plasma chemical vapor deposition Diamond and Related Materials Vol.14,pp.975-982 2005
Papers
Photovoltaic characteristics of nitrogen-doped amorphous carbon thin-films grown on quarts and flexible plastic substrates by microwave surface wave plasma CVD Diamond and Related Materials Vol.14,pp.1084-1088 2005
Papers
Photovoltaic characteristics of nitrogen-doped amorphous carbon thin-films grown on quarts and flexible plastic substrates by microwave surface wave plasma CVD Diamond and Related Materials Vol.14,pp.1084-1088 2005
Papers
Photovoltaic characteristics of nitrogen-doped amorphous carbon thin-films grown on quartz and flexible plastic substrates by microwave surface wave plasma CVD Diamond and Related Materials Vol.14,pp.1084-1088 2005
Papers
Photovoltaic characteristics of nitrogen-doped amorphous carbon thin-films grown on quartz and flexible plastic substrates by microwave surface wave plasma CVD Diamond and Related Materials Vol.14,pp.1084-1088 2005
Papers
Photovoltaic characteristics of postdeposition iodine-doped amorphous carbon films by microwave surface wave plasma chemical vapor deposition Applied physics letters Vol.87, 161912 2005
Papers
Photovoltaic characteristics of postdeposition iodine-doped amorphous carbon films by microwave surface wave plasma chemical vapor deposition Applied physics letters Vol.87, 161912 2005
Papers
Effects of iodine doping on optoelectronic properties of diamond-like carbon thin films deposited by microwave surface wave plasma CVD Diamond and Related Materials Vol. 13,pp.2136-2139 2004
Papers
Effects of iodine doping on optoelectronic properties of diamond-like carbon thin films deposited by microwave surface wave plasma CVD Diamond and Related Materials Vol. 13,pp.2136-2139 2004
Papers
The optical properties of nitrogenated amorphous carbon grown by a novel surface wave microwave plasma CVD method Modern Physics Letters B Vol.18,pp.987 2004
Papers
The optical properties of nitrogenated amorphous carbon grown by a novel surface wave microwave plasma CVD method Modern Physics Letters B Vol.18,pp.987 2004
Papers
Application of Phosphorus and Boron Diffusion Parameters Extracted from Predeposition to Drive-in Diffusion for Bulk Silicon and Silicon-on-Insulator Japanese Journal of Applied Physics Vol.42, Part 1 (No.4A) 2003
Papers
Application of Phosphorus and Boron Diffusion Parameters Extracted from Predeposition to Drive-in Diffusion for Bulk Silicon and Silicon-on-Insulator Japanese Journal of Applied Physics Vol.42, Part1 (No.4A) 2003
Papers
Sb Pile-up at Oxide/Si Interface during Drive-in Diffusion after Predeposition Using Doped Oxide Source Japanese Journal of Applied Physics Vol.42, Part 1 (No.3) 2003
Papers
Sb Pile-up at Oxide/Si Interface during Drive-in Diffusion after Predeposition Using Doped Oxide Source Japanese Journal of Applied Physics Vol.42, Part1 (No.3) 2003
Papers
Boron Diffusion Profiles in Ultrathin Silicon-on-Insulator Structures and Their Relation to Crystalline Quality Japanese Journal of Applied Physics Vol.41, Part 1 (No.7A) 2002
Papers
Boron Diffusion Profiles in Ultrathin Silicon-on-Insulator Structures and Their Relation to Crystalline Quality Japanese Journal of Applied Physics Vol.41, Part1 (No.7A) 2002
Papers
Surface Concentration Dependence of Diffusion Profile Shape for Phosphorus in Si Solid State Phenomena Vols.87-79 2001
Papers
Surface Concentration Dependence of Diffusion Profile Shape for Phosphorus in Si Solid State Phenomena Vols.87-79 2001