Academic conference presentation
2013/01
Curling Probe Monitoring of Plasma CVD and Wall Cleaning Processes
(5th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2013) Tup-A07OA)
2013/01
Curling Probe Monitoring of Plasma CVD and Wall Cleaning Processes' Tup-A07OA
(5th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2013))
2013/01
Effects of configuration on resonance characteristics of plane-type microwave resonator probe
(5th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2013) P1024.)
2013/01
Effects of configuration on resonance characteristics of plane-type microwave resonator probe
(5th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2013) P1024.)
2013/01
In-itu photo luminescence observation of GaN thin film exposed in inductively-coupled plasmas
(5th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2013) P1030A)
2013/01
In-itu photo luminescence observation of GaN thin film exposed in inductively-coupled plasmas
(5th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2013) P1030A)
2012/11
In-situ Photoluminescence Measurements of GaN Films Exposed to Inductively-Coupled Plasmas
(34th Int. Symp. Dry Process (DPS2012)P-64)
2012/11
In-situ Photoluminescence Measurements of GaN Films Exposed to Inductively-Coupled Plasmas
(34th Int. Symp. Dry Process (DPS2012) P-64)
2012/11
Monitoring of electron density and wall deposit by curling probe during plasma process
(34th Int. Symp. Dry Process (DPS2012) E-4)
2012/11
Monitoring of electron density and wall deposit by curling probe during plasma process
(34th Int. Symp. Dry Process (DPS2012) E-4)
2012/10
In Situ Monitoring of Electron Density and Dielectric Layer on the Wall with Curling Probe
(AVS 59th International Symposium and Exhibition PS1-WeA3)
2012/10
In Situ Monitoring of Electron Density and Dielectric Layer on the Wall with Curling Probe
(AVS 59th International Symposium and Exhibition PS1-WeA3)
2012/10
In-situ Monitoring of Surface Modification of GaN Films Exposed to Inductively-Coupled Plasmas
(65th Annual Gaseous Electronics Conference (GEC)NW1.00072)
2012/10
In-situ Monitoring of Surface Modification of GaN Films Exposed to Inductively-Coupled Plasmas
(65th Annual Gaseous Electronics Conference (GEC) NW1.00072)
2012/10
Novel diagnostic tool, curling probe, for monitoring electron density during plasma processing
(65th Annual Gaseous Electronics Conference (GEC)DT1.00004)
2012/10
Novel diagnostic tool, curling probe, for monitoring electron density during plasma processing
(65th Annual Gaseous Electronics Conference (GEC) DT1.00004)
2012/07
In-situ photoluminescence monitoring of GaN in plasma exposure
(4th Int. Conf. Microelectronics & Plasma Technology (ICMAP2012) S021 2012-372, p. 505)
2012/07
In-situ photoluminescence monitoring of GaN in plasma exposure
(4th Int. Conf. Microelectronics & Plasma Technology (ICMAP2012)S021 2012-372, p. 505)
2012/03
Miniaturization of Plane-Type Microwave Resonator Probe with Multi-Resonant Frequencies
(5th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2012) P-01)
2012/03
Miniaturization of Plane-Type Microwave Resonator Probe with Multi-Resonant Frequencies
(5th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2012) P-01)