Book and thesis
Papers
Electron Density Range Measurable by Microwave Resonator Probe with Higher Mode Resonance Japanese Journal of Applied Physics (Vol. 50),pp.116101-1-116101-6 2011
Papers
Electron Density Range Measurable by Microwave Resonator Probe with Higher Mode Resonance Japanese Journal of Applied Physics Vol. 50,pp.116101-1 2011
Papers
Modeling Microwave Resonance of Curling Probe for Density Measurements in Reactive Plasmas Appl. Phys. Express (Vol. 4),pp.066101-1 2011
Papers
Modeling Microwave Resonance of Curling Probe for Density Measurements in Reactive Plasmas Appl. Phys. Express Vol. 4,pp.066101-1 2011
Papers
Observation of Optical Fluorescence of GaN Thin Films in an Inductively-Coupled Plasma Containing High Energy Electrons Japanese Journal of Applied Physics (Vol. 50),pp.01AA02-1 2011
Papers
Observation of Optical Fluorescence of GaN Thin Films in an Inductively-Coupled Plasma Containing High Energy Electrons Japanese Journal of Applied Physics Vol. 50,pp.01AA02-1 2011
Papers
Simulation of Resistive Microwave Resonantor Probe for High Pressure Plasma Diagnostics Plasma Sources Science and Technology (Vol. 18),pp.45009 2009
Papers
Simulation of Resistive Microwave Resonantor Probe for High Pressure Plasma Diagnostics Plasma Sources Science and Technology Vol. 18,pp.45009 2009
Papers
Application of Droplet-Free Metal Ion Source to Formation of Gas Barrier Thin Films Physica Status Solidi c Vol. 5 (No. 4),pp.887 2008
Papers
Application of Droplet-Free Metal Ion Source to Formation of Gas Barrier Thin Films Physica Status Solidi c Vol. 5 (No. 4),pp.887 2008
Papers
Ar/O2 Gas Pressure Dependence of Atomic Concentration of Zirconia Prepared by Ziconium Pulse Arc PBII&D Nuclear Instruments and Methods in Physics research B Vol. 242,pp.318 2006
Papers
Ar/O2 Gas Pressure Dependence of Atomic Concentration of Zirconia Prepared by Ziconium Pulse Arc PBII&D Nuclear Instruments and Methods in Physics research B Vol. 242,pp.318 2006
Papers
Droplet-Free High-Density Metal Ion Source for Plasma Immersion Ion Implantation Nuclear Instruments and Methods in Physics research B Vol. 242,pp.315 2006
Papers
Droplet-Free High-Density Metal Ion Source for Plasma Immersion Ion Implantation Nuclear Instruments and Methods in Physics research B Vol. 242,pp.315 2006
Papers
Significant Enhancement of Ion-Induced Secondary Electron Current by Photons in Plasma Immersion Ion Implantation Surf. Coat. Technol Vol. 196 (No. 1-3),pp.184 2005
Papers
Significant Enhancement of Ion-Induced Secondary Electron Current by Photons in Plasma Immersion Ion Implantation Surf. Coat. Technol. Vol. 196 (No. 1-3),pp.184 2005